TESCOM 15系列 減壓調(diào)壓閥-艾默生EMERSON
TESCOM 15 Series is designed for ultra high flow applications of up to 28,300 SLPM. The 15 Series is an ultra high purity, 10 Ra, bulk gas pressure reducing regulator. Inlet of 300 psig / 20.7 bar, outlet up to 150 psig / 10.3 bar. Electronically controlled option isavailable.
Application
• Facility Bulk Gas Delivery Features and Benefits
• Diaphragm sensing element maintains very accurate downstream pressure
• 10 Ra microinch internal surface finishes with full internal electropolish
• 316L Stainless Steel bar stock construction
• Two loading options available: Spring/wrenchadjust and air-actuated
• Two sensing options available: Diaphragm and bellows (bellows sensing element expands flow capability beyond 1200 SCFM / 33,960 SLPM)
• Compatible with ER5000 Electronic Controller