TESCOM 23系列 減壓調(diào)壓閥-艾默生EMERSON
TESCOM 23 Series ultra high purity in-line regulator offers 10 Ra microinch finish with high flow capabilities up to 950 SLPM. The tied diaphragm 23 Series provides an internally springless and threadless design with inlet pressure of 250 psig /
17.2 bar and outlet pressure up to 100 psig / 6.9 bar.
Application
• High flow in-line regulator excellent for purging
Features and Benefits
• Smooth unobstructed flow path for complete purging
• Minimized particle generation because of springless and threadless construction
• Positive shut-off seal with positionable bonnet
• Excellent leak integrity is created by metal-to-metal diaphragm to body seal
• Meets SEMI F19, UHP Grade
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